Applications of Finite Element Methods for Reliability Studies on ULSI
Interconnections provides a detailed description of the application of
finite element methods (FEMs) to the study of ULSI interconnect
reliability. Over the past two decades the application of FEMs has
become widespread and continues to lead to a much better understanding
of reliability physics.
To help readers cope with the increasing sophistication of FEMs'
applications to interconnect reliability, Applications of Finite
Element Methods for Reliability Studies on ULSI Interconnections will:
- introduce the principle of FEMs;
- review numerical modeling of ULSI interconnect reliability;
- describe the physical mechanism of ULSI interconnect reliability
encountered in the electronics industry; and
- discuss in detail the use of FEMs to understand and improve ULSI
interconnect reliability from both the physical and practical
perspective, incorporating the Monte Carlo method.
A full-scale review of the numerical modeling methodology used in the
study of interconnect reliability highlights useful and noteworthy
techniques that have been developed recently. Many illustrations are
used throughout the book to improve the reader's understanding of the
methodology and its verification. Actual experimental results and
micrographs on ULSI interconnects are also included.
Applications of Finite Element Methods for Reliability Studies on ULSI
Interconnections is a good reference for researchers who are working on
interconnect reliability modeling, as well as for those who want to know
more about FEMs for reliability applications. It gives readers a
thorough understanding of the applications of FEM to reliability
modeling and an appreciation of the strengths and weaknesses of various
numerical models for interconnect reliability.
