Ivor Brodie

(Author)

The Physics of Microfabrication (Softcover Reprint of the Original 1st 1982)Paperback - Softcover Reprint of the Original 1st 1982, 26 June 2013

The Physics of Microfabrication (Softcover Reprint of the Original 1st 1982)
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Print Length
504 pages
Language
English
Publisher
Springer
Date Published
26 Jun 2013
ISBN-10
1489921621
ISBN-13
9781489921628

Description

The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite the relatively small size of our research activity. We have frequently been asked to deliver seminars or provide reviews on various aspects of micro- fabrication. These activities made us aware of the need for a comprehensive overview of the physics of microfabrication. We hope that this book will fill that need.

Product Details

Authors:
Ivor BrodieJulius J Muray
Book Edition:
Softcover Reprint of the Original 1st 1982
Book Format:
Paperback
Country of Origin:
NL
Date Published:
26 June 2013
Dimensions:
23.39 x 15.6 x 2.67 cm
ISBN-10:
1489921621
ISBN-13:
9781489921628
Language:
English
Location:
New York, NY
Pages:
504
Publisher:
Weight:
725.75 gm

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