The Advanced Research Workshop on the Physical Properties of
Semiconductor Interfaces at the Sub-Nanometer Scale was held from 31
August to 2 September, 1992, in Riva del Garda. Italy. The aim of the
workshop was to bring together experts in different aspects of the study
of semiconductor interfaces and in small-scale devices where the
interface properties can be very significant It was our aim that this
would help focus research of the growth and characterization of
semiconductor interfaces at the atomic scale on the issues that will
have the greatest impact on devices of the future. Some 30 participants
from industrial and academic research institutes and from 11 countries
contributed to the workshop with papers on their recent wode. . 'There
was ample time for discussion after each talk. as well as a summary
discussion at the end of the meeting. The major themes of the meeting
are described below. The meeting included several talks relating to the
different growth techniques used in heteroepitaxial growth of
semiconductors. Horikoshi discussed the atomistic processes involved in
MBE, MEE and MOCVD, presenting results of experimental RHEED and
photoluminescence measurements; Foxon compared the merits of MBE, MOCVD,
and eBE growth; Molder described RHEED studies of Si/Ge growth by GSMBE,
and Pashley discussed the role of surface reconstructions in MBE growth
as seen from STM studies on GaAs. On the theoretical side, Vvedensky
described several different methods to model growth: molecular dynamics,
Monte Carlo techniques, and analytic modeling.