In the last decade, since the publication of the first edition of
Scanning Electron Microscopy and X-ray Microanalysis, there has been a
great expansion in the capabilities of the basic SEM and EPMA. High-
resolution imaging has been developed with the aid of an extensive range
of field emission gun (FEG) microscopes. The magnification ranges of
these instruments now overlap those of the transmission electron
microscope. Low-voltage microscopy using the FEG now allows for the
observation of noncoated samples. In addition, advances in the develop-
ment of x-ray wavelength and energy dispersive spectrometers allow for
the measurement of low-energy x-rays, particularly from the light
elements (B, C, N, 0). In the area of x-ray microanalysis, great
advances have been made, particularly with the "phi rho z" [Ij)(pz)]
technique for solid samples, and with other quantitation methods for
thin films, particles, rough surfaces, and the light elements. In
addition, x-ray imaging has advanced from the conventional technique of
"dot mapping" to the method of quantitative compositional imaging.
Beyond this, new software has allowed the development of much more
meaningful displays for both imaging and quantitative analysis results
and the capability for integrating the data to obtain specific
information such as precipitate size, chemical analysis in designated
areas or along specific directions, and local chemical inhomogeneities.