Victor E Borisenko

(Author)

Rapid Thermal Processing of Semiconductors (Softcover Reprint of the Original 1st 1997)Paperback - Softcover Reprint of the Original 1st 1997, 20 June 2013

Rapid Thermal Processing of Semiconductors (Softcover Reprint of the Original 1st 1997)
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Part of Series
Microdevices
Print Length
358 pages
Language
English
Publisher
Springer
Date Published
20 Jun 2013
ISBN-10
148991806X
ISBN-13
9781489918062

Description

Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.

Product Details

Authors:
Victor E BorisenkoPeter J Hesketh
Book Edition:
Softcover Reprint of the Original 1st 1997
Book Format:
Paperback
Country of Origin:
NL
Date Published:
20 June 2013
Dimensions:
23.39 x 15.6 x 2.01 cm
ISBN-10:
148991806X
ISBN-13:
9781489918062
Language:
English
Location:
New York, NY
Pages:
358
Publisher:
Weight:
535.24 gm

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