Research into and development of high-precision systems,
microelectromechanical systems, distributed sensors/actuators, smart
structural systems, high-precision controls, etc. have drawn much
attention in recent years. These new devices and systems will bring
about a new technical revolution in modern industries and impact future
human life.
This book presents a unique overview of these technologies such as
silicon based sensors/actuators and control piezoelectric micro
sensors/actuators, micro actuation and control, micro sensor
applications in robot control, optical fiber sensors/systems, etc.
These are four essential subjects emphasized in the book: 1. Survey of
the (current) research and development; 2. Fundamental theories and
tools; 3. Practical applications. 4. Outlining future research and
development.