Applications of precision engineering, generally defined as
manufacturing to tolerances that are better than one part in
105, abound and can be found in various semiconductor
processes (e.g., lithography, wafer probing, inspection), co-ordinate
measuring machines, precision metrology systems (e.g., scanning probe
microscopy), and robot/machine tools to carry out micro-assembly (e.g.,
micro-electro-mechanical systems) and delicate short-wavelength laser
processes.
Precision Motion Control (second edition) focuses on enabling
technologies for precision engineering - issues of direct importance to
be addressed in the overall system design and realization: precision
instrumentation and measurement, geometrical calibration and
compensation, and motion control. It is a compilation of the most
important results and publications from a major project that develops a
state-of-the-art, high-speed, ultra-precision robotic system.
The second edition has been extensively edited and rewritten throughout
with the following particular areas being expanded or added:
- piezoelectric actuators;
- fine movement control;
- gantry-stage control;
- interpolation of quadrature encoder signals;
- geometrical error modelling for single-, dual- and general-XY-axis
stages.
By providing detailed experimental verifications of the material
developed, a comprehensive and thorough treatment of the subject matter
is provided in a manner that is accessible to a broad base of readers,
ranging from academics to practitioners.
