The purposes of this book are many. First, we must point out that it is
not a device book, as a proper treatment of the range of important
devices would require a much larger volume even without treating the
important physics for submicron devices. Rather, the book is written
principally to pull together and present in a single place, and in a
(hopefully) uniform treatment, much of the understanding on relevant
physics for submicron devices. Indeed, the understand- ing that we are
trying to convey through this work has existed in the literature for
quite some time, but has not been brought to the full attention of those
whose business is the making of submicron devices. It should be remarked
that much of the important physics that is discussed here may not be
found readily in devices at the 1.0-JLm level, but will be found to be
dominant at the O.I-JLm level. The range between these two is rapidly
being covered as technology moves from the 256K RAM to the 16M RAM
chips.