Optical MEMS are micro-electromechanical systems merged with
micro-optics. They allow sensing or manipulating optical signals on a
very small size scale using integrated mechanical, optical, and
electrical systems and hold great promise specifically in biomedical
applications, among others.
This book describes the current state of optical MEMS in chemical and
biomedical analysis with topics covered including fabrication and
manufacturing technology for optical MEMS; electrothermally-actuated
MEMS scanning micromirrors and their applications in endoscopic optical
coherence tomography imaging; electrowetting-based microoptics;
microcameras; biologically inspired optical surfaces for miniaturized
optical systems; tuning nanophotonic cavities with nanoelectromechanical
systems; quantum dot nanophotonics - micropatterned excitation,
microarray imaging and hyperspectral microscopy; photothermal
microfluidics; optical manipulation for biomedical applications;
polymer-based optofluidic lenses; and nanostructured aluminum
oxide-based optical biosensing and imaging.
Bringing together topics representing the most exciting progress made
and current trends in the field in recent years, this book is an
essential addition to the bookshelves of researchers and advanced
students working on developing, manufacturing or applying optical MEMS
and other sensors.
