Over the past two decades, technologies for microsystems fabrication
have made considerable progress. This has made possible a large variety
of new commercial devices ranging, for example, from integrated pressure
and acceleration microsensors to active micromirror arrays for image
projection. In the near future, there will be a number of new devices,
which will be commercialized in many application areas.
The field of microsystems is characterized by its wide diversity, which
requires a multidisciplinary approach for design and processes as well
as in application areas. Although there is a common technological
background derived from integrated circuits, it is clear that
microsystems will require additional application-specific technologies.
Since most microsystem technologies are based on batch processing and
dedicated to mass production, prototyping is likely to be an expensive
and time-consuming step. It is recognized that standardization of the
processes as well as of the design tools will definitely help reduce the
entry cost of microsystems. This creates a very challenging situation
for the design, modeling and simulation of microsystems.
Methodology for the Modeling and Simulation of Microsystems is the
first book to give an overview of the problems associated with modeling
and simulation of microsystems. It introduces a new methodology, which
is supported by several examples. It should provide a useful starting
point for both scientists and engineers seeking background information
for efficient design of microsystems.
