Mechanics of Microsystems
Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo
Ghisi and Stefano Mariani, Politecnico di Milano, Italy
A mechanical approach to microsystems, covering fundamental concepts
including MEMS design, modelling and reliability
Mechanics of Microsystems takes a mechanical approach to microsystems
and covers fundamental concepts including MEMS design, modelling and
reliability. The book examines the mechanical behaviour of microsystems
from a 'design for reliability' point of view and includes examples of
applications in industry.
Mechanics of Microsystems is divided into two main parts. The first
part recalls basic knowledge related to the microsystems behaviour and
offers an overview on microsystems and fundamental design and modelling
tools from a mechanical point of view, together with many practical
examples of real microsystems. The second part covers the mechanical
characterization of materials at the micro-scale and considers the most
important reliability issues (fracture, fatigue, stiction, damping
phenomena, etc) which are fundamental to fabricate a real working
device.
Key features:
- Provides an overview of MEMS, with special focus on mechanical-based
Microsystems and reliability issues.
- Includes examples of applications in industry.
- Accompanied by a website hosting supplementary material.
The book provides essential reading for researchers and practitioners
working with MEMS, as well as graduate students in mechanical, materials
and electrical engineering.
