Low Dielectric Constant Materials for IC Applications (Softcover Reprint of the Original 1st 2003)Paperback - Softcover Reprint of the Original 1st 2003, 4 October 2012

Low dielectric materials are an important component of microelectronic devices. In this carefully edited volume the leading researchers give an introduction to and a survey of the various fields of dielectrics for IC integration. The book appeals to materials reserachers, electrical engineers and advanced students.