Emanuele Rimini

(Author)

Ion Implantation: Basics to Device Fabrication (1995)Hardcover - 1995, 31 December 1994

Ion Implantation: Basics to Device Fabrication (1995)
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Part of Series
The Springer International Engineering and Computer Science
Part of Series
Kluwer International Series in Engineering & Computer Science
Part of Series
International Series in Engineering and Computer Science
Part of Series
Studies in Risk and Uncertainty
Part of Series
Springer International Series in Engineering and Computer Sc
Print Length
393 pages
Language
English
Publisher
Springer
Date Published
31 Dec 1994
ISBN-10
0792395204
ISBN-13
9780792395201

Description

Ion implantation offers one of the best examples of a topic that starting from the basic research level has reached the high technology level within the framework of microelectronics. As the major or the unique procedure to selectively dope semiconductor materials for device fabrication, ion implantation takes advantage of the tremendous development of microelectronics and it evolves in a multidisciplinary frame. Physicists, chemists, materials sci- entists, processing, device production, device design and ion beam engineers are all involved in this subject. The present monography deals with several aspects of ion implantation. The first chapter covers basic information on the physics of devices together with a brief description of the main trends in the field. The second chapter is devoted to ion im- planters, including also high energy apparatus and a description of wafer charging and contaminants. Yield is a quite relevant is- sue in the industrial surrounding and must be also discussed in the academic ambient. The slowing down of ions is treated in the third chapter both analytically and by numerical simulation meth- ods. Channeling implants are described in some details in view of their relevance at the zero degree implants and of the available industrial parallel beam systems. Damage and its annealing are the key processes in ion implantation. Chapter four and five are dedicated to this extremely important subject.

Product Details

Author:
Emanuele Rimini
Book Edition:
1995
Book Format:
Hardcover
Country of Origin:
US
Date Published:
31 December 1994
Dimensions:
23.39 x 15.6 x 2.39 cm
ISBN-10:
0792395204
ISBN-13:
9780792395201
Language:
English
Location:
New York, NY
Pages:
393
Publisher:
Weight:
743.89 gm

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