Interfaces between dissimilar materials are met everywhere in
microelectronics and microsystems. In order to ensure faultless
operation of these highly sophisticated structures, it is mandatory to
have fundamental understanding of materials and their interactions in
the system. In this difficult task, the "traditional" method of trial
and error is not feasible anymore; it takes too much time and repeated
efforts. In Interfacial Compatibility in Microelectronics, an
alternative approach is introduced.
In this revised method four fundamental disciplines are combined: i)
thermodynamics of materials ii) reaction kinetics iii) theory of
microstructures and iv) stress and strain analysis. The advantages of
the method are illustrated in Interfacial Compatibility in
Microelectronics which includes:
-solutions to several common reliability issues in microsystem
technology,
-methods to understand and predict failure mechanisms at interfaces
between dissimilar materials and
-an approach to DFR based on deep understanding in materials science,
rather than on the use of mechanistic tools, such as FMEA.
Interfacial Compatibility in Microelectronics provides a clear and
methodical resource for graduates and postgraduates alike.