This book provides a comprehensive treatment of the very
interdisciplinary ?eld of CMOS technology-based chemical microsensor
systems. It is, on the one hand, targeted at scientists and engineers
interested in getting rst - sights in the ?eld of chemical sensing since
all necessary fundamental kno- edgeisincluded.Ontheotherhand,
italsoaddressesexpertsinthe?eldsince it provides detailed information on
all important issues related to realizing chemicalmicrosensorsand,
speci?cally, chemicalmicrosensorsinCMOSte- nology. A large number of
sensor and integrated-sensor-system implemen-
tionsillustratethecurrentstateoftheartandhelptoidentifythepossibilities
for future developments. Since microsensors produce "microsignals",
sensor miniaturization without sensor integration is in many cases prone
to failure. This book will help to reveal the bene?ts of using
integrated electronics and CMOS-technology for developing chemical
microsensor systems and, in p- ticular, the advantages that result from
realizing monolithically integrated sensor systems comprising
transducers and associated circuitry on a single chip. After a brief
introduction, the fundamentals of chemical sensing are laid out,
includingashortexcursionintotherelatedthermodynamicsandkinetics.
Fabrication and processing steps that are commonly used in semiconductor
industry are then abstracted. These more fundamental sections are
followed by a short description of microfabrication techniques and the
CMOS s- strateandmaterials.Thereafter,
acomprehensiveoverviewofsemiconduct- based and CMOS-based transducer
structures for chemical sensors is given.
