K Tanaka

(Author)

Glow-Discharge Hydrogenated Amorphous Silicon (1990)Hardcover - 1990, 30 November 1989

Name: Glow-Discharge Hydrogenated Amorphous Silicon (1990)
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ISBN: 0792303091

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Part of Series

Advances in Solid State Technology

Print Length

277 pages

Date Published

30 Nov 1989

ISBN-10

0792303091

ISBN-13

9780792303091

Description

A graduate-level description of recent Japanese research on the chemistry of amorphous silicon film deposition associated with plasma CVD, a step in producing amorphous semiconductors. Reports on studies (of microscopic processes of gas-phase reaction as well as chemical reactions on the film growin

Product Details

Author:

K Tanaka

Book Edition:

1990

Book Format:

Hardcover

Country of Origin:

Date Published:

30 November 1989

Dimensions:

23.39 x 15.6 x 1.75 cm

ISBN-10:

0792303091

ISBN-13:

9780792303091

Language:

English

Location:

Dordrecht

Pages:

277

Publisher:

Springer

Series:

Advances in Solid State Technology

Weight:

585.13 gm

Description

Product Details

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