Modern science and technology, from materials science to integrated
circuit development, is directed toward the nanoscale. This book focuses
on the fundamental physics underlying the techniques used to analyze the
nature of surfaces and near-surfaces in the properties of materials.
From thin films to field effect transistors, the emphasis is on reducing
dimensions from the micro to the nanoscale. Coverage includes new
analytical techniques, such as x-ray fluorescence (XRF) in thin film
analysis. This volume updates (with a nano focus) the well regarded 1986
book, Surface and Thin Film Analysis, by Feldman and Mayer.