Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices (1998)Hardcover - 1998, 31 March 1998

Name: Fundamental Aspects of Ultrathin Dielectrics on Si-Based Devices (1998)
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ISBN: 0792350073

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Part of Series

NATO Science Partnership Subseries: 3

Part of Series

NATO Science Partnership Sub-Series 3: High Technology

Part of Series

NATO Science Series. Partnership Sub-Series 3, High Technolo

Part of Series

NATO Science Partnership Sub-Series: 3:

Print Length

507 pages

Date Published

31 Mar 1998

ISBN-10

0792350073

ISBN-13

9780792350071

Description

An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wish to learn more about the exciting basic research issues relevant to next-generation device technology.

Product Details

Book Edition:

1998

Book Format:

Hardcover

Country of Origin:

Date Published:

31 March 1998

Dimensions:

23.39 x 15.6 x 2.87 cm

ISBN-10:

0792350073

ISBN-13:

9780792350071

Language:

English

Location:

Dordrecht

Pages:

507

Publisher:

Springer

Series:

NATO Science Partnership Subseries: 3 NATO Science Partnership Sub-Series 3: High Technology NATO Science Series. Partnership Sub-Series 3, High Technolo NATO Science Partnership Sub-Series: 3:

Weight:

902.65 gm

Description

Product Details

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