Miklos Szilagyi

(Author)

Electron and Ion Optics (Softcover Reprint of the Original 1st 1988)Paperback - Softcover Reprint of the Original 1st 1988, 10 October 2011

Electron and Ion Optics (Softcover Reprint of the Original 1st 1988)
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Part of Series
Microdevices
Print Length
556 pages
Language
English
Publisher
Springer
Date Published
10 Oct 2011
ISBN-10
1461282470
ISBN-13
9781461282471

Description

The field of electron and ion optics is based on the analogy between geometrical light optics and the motion of charged particles in electromagnetic fields. The spectacular development of the electron microscope clearly shows the possibilities of image formation by charged particles of wavelength much shorter than that of visible light. As new applications such as particle accelerators, cathode ray tubes, mass and energy spectrometers, microwave tubes, scanning-type analytical instruments, heavy beam technologies, etc. emerged, the scope of particle beam optics has been exten- ded to the formation of fine probes. The goal is to concentrate as many particles as possible in as small a volume as possible. Fabrication of microcircuits is a good example of the growing importance of this field. The current trend is towards increased circuit complexity and pattern density. Because of the diffraction limitation of processes using optical photons and the technological difficulties connected with x-ray processes, charged particle beams are becoming popular. With them it is possible to write directly on a wafer under computer control, without using a mask. Focused ion beams offer especially great possibilities in the submicron region. Therefore, electron and ion beam technologies will most probably playa very important role in the next twenty years or so.

Product Details

Author:
Miklos Szilagyi
Book Edition:
Softcover Reprint of the Original 1st 1988
Book Format:
Paperback
Country of Origin:
NL
Date Published:
10 October 2011
Dimensions:
24.41 x 16.99 x 2.9 cm
ISBN-10:
1461282470
ISBN-13:
9781461282471
Language:
English
Location:
New York, NY
Pages:
556
Publisher:
Weight:
879.97 gm

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